Silicon Nitride Etching is considered as one of the most demanding processes in the industry that it requires a thorough knowledge and understanding on the chemistry involved and the specific requirements in the wet process. Understanding the principles behind this approach can be very helpful most especially to the companies in the semiconductor industry.
So, how it is carried out? The process includes the following:
* The required materials are readied for exposure to right temperatures where the goal is to achieve the greatest etch and the best selectivity - this is made possible with the use of phosphoric acid on its highest ratio of water at a given temperature.
* Integration/ installation of water addition system - a way to keep ideal amount of water in the wet process system.
* Using a closed system, like Imtec's Nitride Etch Accubaths, precised control of temperature and acid concentrations are achievable.
* The use of closed refluxing system, together with a system's control algorithm, to help ensure that uniformed conditions are made through the bath, which is the key to achieve a precisely controlled etch rate and the best possible selectivity.
* When it comes to ensuring that liquid and fumes are prevented from entering the heater area, there are particular components developed to act as barrier (such as the aquaseal from Accubath) between the sealant and the harsh environment, eliminating the most common failure mode seen on heated wet process tanks.
Silicon Nitride Etching - The industry benefits
There are a number of benefits that the production of Silicon Nitrite films provide more specifically to the semiconductor industry. It helps in various applications, including the following:
* for the production of integrated circuits - a very important component that is used in most, if not all, of electronic devices found in the market these days.
*used as masking layers for local oxidation of silicon
* utilized as electrical insulators having a comparatively high dielectric constant
Aside from the semiconductor industry, Silicon Nitride etching (its finished products) provides benefits to the automobile industry (e.g. sintered silicon nitride as a material for engine parts); bearings (e.g. ceramic bearings have good resistance shock); and, medical industry (e.g. as an alternative polyether ether ketone and titanium
So, how it is carried out? The process includes the following:
* The required materials are readied for exposure to right temperatures where the goal is to achieve the greatest etch and the best selectivity - this is made possible with the use of phosphoric acid on its highest ratio of water at a given temperature.
* Integration/ installation of water addition system - a way to keep ideal amount of water in the wet process system.
* Using a closed system, like Imtec's Nitride Etch Accubaths, precised control of temperature and acid concentrations are achievable.
* The use of closed refluxing system, together with a system's control algorithm, to help ensure that uniformed conditions are made through the bath, which is the key to achieve a precisely controlled etch rate and the best possible selectivity.
* When it comes to ensuring that liquid and fumes are prevented from entering the heater area, there are particular components developed to act as barrier (such as the aquaseal from Accubath) between the sealant and the harsh environment, eliminating the most common failure mode seen on heated wet process tanks.
Silicon Nitride Etching - The industry benefits
There are a number of benefits that the production of Silicon Nitrite films provide more specifically to the semiconductor industry. It helps in various applications, including the following:
* for the production of integrated circuits - a very important component that is used in most, if not all, of electronic devices found in the market these days.
*used as masking layers for local oxidation of silicon
* utilized as electrical insulators having a comparatively high dielectric constant
Aside from the semiconductor industry, Silicon Nitride etching (its finished products) provides benefits to the automobile industry (e.g. sintered silicon nitride as a material for engine parts); bearings (e.g. ceramic bearings have good resistance shock); and, medical industry (e.g. as an alternative polyether ether ketone and titanium
About the Author:
Paul Drake has had long years working in a high tech company before venturing on the Internet as a freelance writer. He leverages his prior experience to write a wide array of topics including wet process and Silicon Nitride Etching. He also runs his own blog, which reflects his on the Internet current works.
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